Brooks SLA Mass Flow Controller Rev 1 valid engineering units and channel values

AO Block: Valid Engineering Units and CHANNEL Values

Setpoing

CHANNEL = 1

Valve Control

CHANNEL = 2

%

%

lb/s

 

AI Block: Valid Engineering Units and CHANNEL Values

Flow

CHANNEL = 3

Position

CHANNEL = 5

Flow Sensor Temperature

CHANNEL = 6

%

%

°C

bbl/h

   

bbl/min

   

bbl/s

   

CFH

   

CFM

   

CFS

   

g/h

   

g/min

   

g/s

   

GPH

   

GPM

   

GPS

   

IMP GPH

   

IMP GPM

   

IMP GPS

   

kg/h

   

kg/min

   

kg/s

   

lb/h

   

lb/min

   

lb/s

   

M3/h

   

m3/s

   

SCCM

   

SLH

   

SLM

   

SLS

   

STon/h

   

STon/m

   

STon/s

   

t/h

   

t/min

   

t/s

   

DO Block: Valid Engineering Units and CHANNEL Values

Valve Override

CHANNEL = 7

0 = Normal

1 = Open Loop

2 = Valve Close

3 = Valve Open

4 = Valve Power Off

5 = Valve Stop

6 = Valve Power On